Nanofabrication Facility

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About Us

Mason’s Nanofabrication Facility (NFF) serves as a core laboratory to conduct innovative research and development on the micro- and nano- scale. It is also a resource for providing hands-on workforce training to ensure we have a diverse, skilled workforce equipped to meet industry demand. The NFF is available to Mason faculty, staff, and students as well as external partners from academia, government, and industry.

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Our Facility

The Nanofabrication Facility is located on George Mason University’s SciTech Campus in Manassas, Virginia. The lab is situated in a multidisciplinary research building home to engineers and scientists dedicated to developing new technologies and training the next generation of innovators. The campus is situated in Innovation Park, with neighboring start-ups to large size tech companies.

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Our Capabilities

The NFF is comprised of a class 1000 clean room and characterization labs. Tools for photolithography, etching, and deposition processes essential for building microfluidics, micro- and nano- electronics, and other devices are available in the clean room. Instruments in the characterization laboratory can be used to conduct materials and device analysis.

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Instruments and services of the NFF are available to the Mason community and other external academic, industry, and government users.

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