Nanofabrication Facility

Filmetrics F20-UVX Thin Film Measurement System

The thin film measurement system (spectral reflectometer) is used to measure thickness, refractive index, and reflectance of thin films. Virtually any smooth, translucent, or light-absorbing film can be measured.

Wavelength range of 190-1700nm

Thickness measurement range of 1-250mm 

Minimum thickness to measure n and k is 50nm

1.5mm spot size