Evaporation is a form of physical vapor deposition (PVD). In evaporation energy is supplied to a source target in the form of a beam of electrons (e-beam evaporation) or a thermal source of energy (thermal evaporation). Material is ejected from the target surface and travels under vacuum to create a film on the surface of a substrate. Many materials can be evaporated but the most common are metals. Evaporation creates thin films, less than one micrometer thick on the sample surface.
Electron beam source with 6 X15cc “pockets”
2KW thermal source
Ion source