Nanofabrication Facility

Fabrication Equipment

Cee X-Pro II Workstation

Specifications

Filmetrics F20-UVX Thin Film Measurement System

Specifications

Heidelberg Instruments μMLA Maskless Alignment System

Specifications

JSM-7200F E-Beam Lithography (EBL)

Specifications

Kurt J. Lesker Company Evaporation System

Specifications

Kurt J. Lesker Company PRO Line PVD 75 Sputter System

Specifications

LM Air Technology Polypropylene Fume Hood/Wet Bench

Specifications

Olympus MX63 Inspection Microscope

Specifications

SAMCO RIE-10NR Reactive Ion Etch System

Specifications

Signatone Pro4 4 Point Probe

Specifications

SUSS MicroTec MA/BA6 Mask Alignment System

Specifications